硕士学位论文
论文题目大行程精密定位平台偏摆误差分析国际枕头大战日
研究生姓名谷洋钦
指导教师姓名陈立国
克氏锥虫专业名称机械电子工程
研究方向微纳米驱动及操作地下城守护者2攻略
论文提交日期 2014年4月
长春中医药大学学报
大行程精密定位平台偏摆误差分析及补偿方法研究
中文摘要
大行程精密定位平台系统在近代尖端工业生产和科学研究领域占有重要地位，随着科学技术的不断发
展，对平台定位精度的要求也越来越高。为满足纳米光刻、超精密加工和微电子工程等新兴领域对相关设备高精度定位的要求，本课题针对直线电机驱动、气浮导轨支撑和导向的大行程精密定位平台，从分析其偏摆误差入手，研究偏摆误差对定位精度的影响及相应补偿方法。
本文首先针对大行程精密定位平台偏摆误差的导致因素进行理论分析，建立相关误差模型。基于气浮导轨滑块副简化的弹簧质量阻尼系统，建立精密定位平台两自由度的偏摆振动模型，计算系统的固有频率，并对偏摆误差幅值进行研究，根据以上结果提出偏摆误差检测系统和微动误差补偿系统的指标要求。
分析大行程精密定位平台偏摆误差的特点，设计一种结合平尺和微位移传感器的高频响、非接触式的偏摆误差检测系统，建立检测算法模型，为误差的实时补偿提供理论基础。设计一种基于压电陶瓷驱动，椭圆形放大机构和柔性铰链传动的微动误差补偿平台。利用理论力学原理，结合有限元分析方法对微动平台进行仿真分析，研究其动、静态特性，确定几何尺寸。针对压电陶瓷驱动的微动补偿平台，研究迟滞前馈控制算法，改善其迟滞特性。
建立基于误差补偿系统的大行程精密定位系统，对微动补偿平台进行实验研究。通过偏摆误差补偿实验，对比误差补偿前后效果，验证基于误差补偿系统的大行程精密定位平台能够实现高精度、大行程的精密定位。
冠菌素
照射雷达
关键词：误差补偿；定位精度；偏摆误差；微动补偿平台；压电陶瓷
作 者：谷洋钦
指导老师：陈立国
Analysis on deflection error and research on
compensation method of large travel precision
positioning platform
Abstract
In the field of modern industrial production and scientific research, large travel precision positioning system occupies an important position. With the continuous development of science and technology, the required positioning accuracy for positioning platform is becoming higher and higher. To meet the requirements of emerging fields, such as nanometer lithography, ultra-precision machining and microelectronics engineering and so on, for high precision positioning. This paper is for the large travel precision positioning platform which driven by linear motor, supported by aerostatic, starting wi
th the analysis of deflection error, studying the influence of the deflection error on the positioning accuracy and the corresponding error compensation method.
This paper carries theoretical analysis aimed at the causing factors of the large travel precision positioning platform’s deflection error, and builds the corresponding error model. Based on mass spring damping system simplified by static-pressure air-bearing sliders, establish a two degrees freedom deflection vibration model of the precision positioning platform, calculate the natural frequency of the system, and study the amplitude of deflection error. According to the above results, index requirements of the error detection and compensation system are proposed.
Analyzing the deflection error characteristics of the platform, design a kind of high frequency response and non-contact deflection error detection system combined with flat feet and micro displacement sensor. Detection algorithm model is established, which provides the theoretical foundation for real-time error compensation. Design a micro error compensation platform based on piezoelectric actuator, oval amplification mechanism and flexible hinges as transmission. Combining with the theoretical mechanics principle, the micro platform is simulated by finite element simulation analysis, research on its dynamic and static characteristics, and the geometry dimensions are determined. In view of the micro compensation platform, study the feedforward control algorithm to i
mprove the hysteresis characteristics.
