多晶硅制备还原工艺的分析与优化
摘 要
目前国内多晶企业所采用的生产方法主要是西门子法或改良西门子法，产物为高纯多晶硅，为降低原材料的消耗，提高经济效益，在不影响多晶硅纯度的情况下最大限度提高原材料的转化率。 麻石脱硫除尘器本文重点介绍了三氯氢硅还原的工艺原理、工艺流程，并对还原反应器提出了相关的优化建议。
关键词：改良西门子法；还原；三氯氢硅；优化
Polysilicon preparation reduction process analysis and optimization
Abstract
Currently used by many domestic production of crystal enterprise method is mainly to Siemens method or improved Siemens method, product purity polysilicon, to reduce the consumption of raw materials, improving economic efficiency, are not affected under the condition of polysilicon purity maximizing conversion of raw materials.
This paper introduces the process of hydrogen silicone reduction trichloramine principle, process flow, and puts forward the relevant to restore the reactor technical advice.
Keyword: Modified Siemens Process；deoxidation ；trichlorosilane；optimizeaaaaaaaaaaaaaaaaaa
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